The world's smallest micro linear pusher

Micromotion GmbH has realised the world's smallest Micro Linear Pusher for optical systems and semiconductor manufacturing equipment. These positioners represent an innovative solution for highly precise linear motion in alignment mechanisms. Based on the Micro Harmonic Drive technology, these devices put the well-known advantages of micro gears (reliability, positioning accuracy and zero backlash) into an extremely compact, light-weight, linear positioning system.

 

 

Smaller, lighter, better

The zero backlash micro linear alignment system is packed into a cross-section of only 10 by 10 mm² and weighs only 22 grams. The length of the Micro Linear Pusher MLP-10 depends on its stroke length and the desired motor type. The shortest system is 59 mm long, is driven by a stepper motor and offers a stroke of 6 mm.

 

 

Completely thought through

The Micro Linear Pusher can be configured with either a stepper motor or a servo motor. This allows it to be uncompromisingly adapted to the desired control environment and process management. Two limit switches are integrated into this micro system to assure absolute operational security without an additional linear measurement system. By combining the zero backlash Micro Harmonic Drive Gear with a zero backlash preloaded nut system, the motor's angular position can be used directly as the position indicator, e.g. the number of steps for a stepper motor or, for encoder systems, by counting pulses.

 

 

Gear reduction ratios for the Micro Linear Pusher

Different reduction ratios can be used to influence both system resolution and alignment speed. For example, with stepper motors operated in half-step mode a theoretical resolution of 0.02 µm can be achieved at alignment speeds of up to 2.5 mm/s. Due to the preloaded spindle nut system, single sided repeatability accuracy is +/– 1 µm and double sided repeatability accuracy is +/– 5 µm. The alignment force, i.e. the axial load capacity, amounts up to 12 N.