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Example actuators for high vacuum and ultra high vacuum

Actuators which operate in high vacuum or ultra high vacuum need special design features, special lubricants and materials. They differ from standard actuators by virtue of their characteristics and their structural design.

 

 

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high vacuum: MHD-10-160-S-SPM0071

 

MHD-10-160-S-SPM0071

Construction for high vacuum up to 10-7 mbar consisting of stepper motor and special gearbox

 

 

 

 

 

ultra high vacuum: MHD-10-160-S-SPM0069

 

MHD-10-160-S-SPM0069

Construction for ultra high vacuum up to 10-12 mbar consisting of Phytron stepper motor and special gearbox

 

 

 

 

 

ultra high vacuum: MLP-10-80-25-ST-SPM0006

 

MLP-10-80-25-ST-SPM0006

Construction for ultra high vacuum up to 10-12 mbar consisting of Phytron stepper motor, special gearbox, ball screw and linear bearing